Non-destructive imaging of residual strains in GaN and their effect on optical and electrical properties using correlative light–electron microscopy
Naresh-Kumar, G. and Edwards, P. R. and Batten, T. and Nouf-Allehiani, M. and Vilalta-Clemente, A. and Wilkinson, A. J. and Le Boulbar, E. and Shields, P. A. and Starosta, B. and Hourahine, B. and Martin, R. W. and Trager-Cowan, C. (2022) Non-destructive imaging of residual strains in GaN and their effect on optical and electrical properties using correlative light–electron microscopy. Journal of Applied Physics, 131 (7). 075303. ISSN 0021-8979 (https://doi.org/10.1063/5.0080024)
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Abstract
We demonstrate a non-destructive approach to understanding the growth modes of a GaN thin film and simultaneously quantify its residual strains and their effect on optical and electrical properties using correlative scanning electron microscopy techniques and Raman microscopy. Coincident strain maps derived from electron backscatter diffraction, cathodoluminescence, and confocal Raman techniques reveal strain variations with similar magnitude and directions, especially in the proximity of dislocations. Correlating confocal Raman imaging with electron channeling contrast imaging suggests that the dislocations organize themselves to form a distinctive pattern as a result of the underlying growth mask, where some of them align along the [0001] growth direction and some are inclined. The methodology presented in this work can be adopted to investigate any heteroepitaxial growth, in particular, those using selective masks on the growth substrates, where the morphology influences the subsequent growth.
ORCID iDs
Naresh-Kumar, G. ORCID: https://orcid.org/0000-0002-9642-8137, Edwards, P. R. ORCID: https://orcid.org/0000-0001-7671-7698, Batten, T., Nouf-Allehiani, M. ORCID: https://orcid.org/0000-0002-4338-1048, Vilalta-Clemente, A., Wilkinson, A. J., Le Boulbar, E., Shields, P. A., Starosta, B., Hourahine, B. ORCID: https://orcid.org/0000-0002-7667-7101, Martin, R. W. ORCID: https://orcid.org/0000-0002-6119-764X and Trager-Cowan, C. ORCID: https://orcid.org/0000-0001-8684-7410;-
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Item type: Article ID code: 79640 Dates: DateEvent21 February 2022Published16 February 2022Published Online26 January 2022AcceptedSubjects: Science > Physics Department: Faculty of Science > Physics Depositing user: Pure Administrator Date deposited: 16 Feb 2022 14:46 Last modified: 11 Nov 2024 13:23 URI: https://strathprints.strath.ac.uk/id/eprint/79640