You do what in your microprobe?! The EPMA as a multimode platform for nitride semiconductor characterization
Edwards, Paul R. and Naresh-Kumar, G. and Kusch, Gunnar and Bruckbauer, Jochen and Spasevski, Lucia and Brasser, Catherine G. and Wallace, Michael J. and Trager-Cowan, Carol and Martin, Robert W. (2018) You do what in your microprobe?! The EPMA as a multimode platform for nitride semiconductor characterization. Microscopy and Microanalysis, 24 (S1). pp. 2026-2027. ISSN 1431-9276 (https://doi.org/10.1017/S1431927618010619)
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Abstract
While the use of electron probe microanalysis (EPMA) is widespread in the geological and metallurgical sciences, it remains less prevalent in the field of semiconductor research. For these materials, trace element (i.e. dopant) levels typically lie near or beneath the detection limit of wavelength-dispersive Xray (WDX) spectrometers, while alloy compositions of ternary mixtures and multilayer structures can more readily be determined using X-ray diffraction techniques. The electron beam measurements more commonly applied to semiconductors remain transmission electron microscopy (for structural characterization), and scanning electron microscopy (topographic, optical and electrical information). Despite this, there are many aspects of the EPMA that make it an attractive platform for all of thesetypes of semiconductor characterization, particularly when combining compositional information fromWDX with complementary and simultaneously-acquired signals. These advantages include: built-inlight optics; a stable, quantified and high-current beam; and a combined large-area and high-resolutionmapping capability. This allows the measurement of cathodoluminescence (CL), electron beam-inducedcurrent (EBIC) and electron channelling contrast imaging (ECCI) signals alongside WDX, which weapply to the investigation of visible and UV AlxInyGa1-x-yN materials, devices and nanostructures.
ORCID iDs
Edwards, Paul R. ORCID: https://orcid.org/0000-0001-7671-7698, Naresh-Kumar, G. ORCID: https://orcid.org/0000-0002-9642-8137, Kusch, Gunnar ORCID: https://orcid.org/0000-0003-2743-1022, Bruckbauer, Jochen ORCID: https://orcid.org/0000-0001-9236-9320, Spasevski, Lucia ORCID: https://orcid.org/0000-0002-7409-3807, Brasser, Catherine G. ORCID: https://orcid.org/0000-0003-2614-1357, Wallace, Michael J. ORCID: https://orcid.org/0000-0003-1511-0627, Trager-Cowan, Carol ORCID: https://orcid.org/0000-0001-8684-7410 and Martin, Robert W. ORCID: https://orcid.org/0000-0002-6119-764X;-
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Item type: Article ID code: 65206 Dates: DateEvent1 August 2018Published1 August 2018Published Online27 March 2018AcceptedSubjects: Science > Physics Department: Faculty of Science > Physics
Strategic Research Themes > Measurement Science and Enabling TechnologiesDepositing user: Pure Administrator Date deposited: 17 Aug 2018 14:05 Last modified: 06 Oct 2024 00:31 Related URLs: URI: https://strathprints.strath.ac.uk/id/eprint/65206