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Janin, Paul and Bauer, Ralf and Griffin, Paul and Riis, Erling and Uttamchandani, Deepak; (2021) A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications. In: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE International Conference on Micro Electrical Mechanical Systems (MEMS) . IEEE, New York, USA, pp. 294-297. ISBN 978-1-6654-1912-3