A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications

Janin, Paul and Bauer, Ralf and Griffin, Paul and Riis, Erling and Uttamchandani, Deepak; (2021) A high-frequency tunable piezoelectric MEMS scanner for fast addressing applications. In: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE International Conference on Micro Electrical Mechanical Systems (MEMS) . IEEE, New York, USA, pp. 294-297. ISBN 978-1-6654-1912-3 (https://doi.org/10.1109/MEMS51782.2021.9375302)

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We present a high-frequency, tunable, piezoelectric MEMS resonant scanner producing an optical scan angle of more than 2° at frequencies above 100 kHz, with non-contact frequency tuning capabilities. The device is fabricated using a cost-efficient multiuser silicon-on-insulator (SOI) process. The scanner uses thin-film piezoelectric aluminium nitride actuators to drive out-of-plane rotation of a 200 μm diameter mirror plate through mechanical coupling stages. Up to 3.6 kHz frequency tuning is achieved through on-chip thermally actuated non-contact beam tips placed adjacent to the scanner. The scanner is intended for use in small-scale, fast optomechanical applications requiring careful synchronization through frequency tuning.