Fabrication of two-dimensional InGaN-based micro-LED arrays

Tools

Jeon, C.W. and Kim, K.S. and Dawson, M.D. (2002) Fabrication of two-dimensional InGaN-based micro-LED arrays. Physica Status Solidi A, 192 (2). pp. 325-328. ISSN 1862-6300 (http://dx.doi.org/10.1002/1521-396X(200208)192:2<3...)

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Abstract

We have successfully fabricated two-dimensional InGaN-based 12 × 12 micro-light emitting diode (LED) arrays with individually addressable emitters having diameters of 8 and 12 m. A new planarisation scheme including gap-filling with plasma enhanced chemical vapour deposition (PECVD) SiO2 and a chemical-mechanical polishing process was successfully developed for the electrical isolation of individual diodes. The uniformity of elements within an array was demonstrated through their electroluminescence and I-V characteristics.

ORCID iDs

Jeon, C.W., Kim, K.S. and Dawson, M.D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989;
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