Analysis of microsprings for calculating the force produced by microactuators

Li, Lijie and Uttamchandani, Deepak G. (2002) Analysis of microsprings for calculating the force produced by microactuators. Proceedings of SPIE, 4755. pp. 394-402. ISSN 0277-786X (https://doi.org/10.1117/12.462836)

PDF. Filename: SpringForForceMeasurements2002.pdf Accepted Author Manuscript Download (389kB)

Abstract

We present models of two types of microsprings namely box-spring and zig-zag spring that can be used to measure the force generated by microactuators. The spring constant for both springs is calculated by FEM using ANSYS software. In these models, the effects of short beams that act as connectors in the spring structures are considered and analyzed by changing their width. Also, from the results, we find that the box spring appears more balanced than the zig-zag spring when the force is applied in the single central direction. A series of SDAs with box spring have been fabricated and forces ofthose SDAs have been calculated.

• Share and Export
  

  RDF+XMLBibTeXRIOXX2 XMLRDF+N-TriplesJSONDublin CoreAtomSimple MetadataReferMETSHTML CitationASCII CitationOpenURL ContextObjectEndNoteOpenURL ContextObject in SpanMODSMPEG-21 DIDLEP3 XMLData Cite XMLRIS (EndNote Online, Zotero, Ref manager, etc)RDF+N3Multiline CSV
• Item metadata

  Item type:	Article
  ID code:	39509
  Dates:	Date Event 19 April 2002 Published
  Notes:	Presented as part of the Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France.
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
  Department:	Faculty of Engineering > Electronic and Electrical Engineering
  Depositing user:	Pure Administrator
  Date deposited:	03 May 2012 14:32
  Last modified:	09 Apr 2024 02:23
  URI:	https://strathprints.strath.ac.uk/id/eprint/39509