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2004
Syms, R. and Zou, H. and Stagg, J. and Yao, J. and Uttamchandani, D.G. (2004) Optical fibre aligner using deep-etched silicon electrothermal actuator. In: IEEE/LEOS Optical MEMS International Conference on optical MEMS and their applications, 2004-08-22 - 2004-08-26.