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Janin, Paul and Bauer, Ralf and Griffin, Paul and Riis, Erling and Uttamchandani, Deepak (2018) Characterization of a fast piezoelectric varifocal MEMS mirror. In: Conference on Optical MEMS and Nanophotonics 2018, 2018-07-29 - 2018-08-02, Ecole Polyechnique Fédérale de Lausanne.