Characterization of a fast piezoelectric varifocal MEMS mirror

Janin, Paul and Bauer, Ralf and Griffin, Paul and Riis, Erling and Uttamchandani, Deepak (2018) Characterization of a fast piezoelectric varifocal MEMS mirror. In: Conference on Optical MEMS and Nanophotonics 2018, 2018-07-29 - 2018-08-02, Ecole Polyechnique Fédérale de Lausanne.

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We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a multi-user silicon-oninsulator process, and its mechanical response to piezoelectric actuation evaluated through laser vibrometry and a dynamic white-light interferometer.