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Fang, Fengzhou and Luo, Xichun and Dai, Gaoliang and Takaya, Yasuhiro and Gao, Wei and Ehmann, Kornel; Tolio, Tullio, ed. (2024) Atomic and close-to-atomic scale manufacturing : the fundamental technology of manufacturing III. In: CIRP Novel Topics in Production Engineering. Lecture Notes in Mechanical Engineering . Springer, Cham, pp. 315-360. ISBN 9783031540349