External linearisation of a MEMS electrothermal scanner with application in a confocal microscope

Poland, S.P. and Girkin, J.M. and Li, L. and Uttamchandani, D.G. (2009) External linearisation of a MEMS electrothermal scanner with application in a confocal microscope. Micro and Nano Letters, 4 (2). pp. 106-111. ISSN 1750-0443 (http://dx.doi.org/10.1049/mnl.2009.0018)

Abstract

A compensatory mapping (CM) technique for external linearisation of a MEMS electrothermally actuated optical scanner is reported. Each individual axis of a two-axis MEMS scanner was linearised by the CM technique, and the scanner was then incorporated into a confocal optical microscope configuration. Cross-talk in the scanner when both axes are driven simultaneously, and arising when a drive signal to one axis of the scanner produces a mechanical response in the orthogonal scan axis, was subsequently compensated for by using a look-up-table optimised using a random search algorithm.

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• Item metadata

  Item type:	Article
  ID code:	9100
  Dates:	Date Event 2009 Published
  Subjects:	Science > Physics > Optics. Light Technology > Electrical engineering. Electronics Nuclear engineering Science > Physics
  Department:	Faculty of Science > Physics > Institute of Photonics Faculty of Engineering > Electronic and Electrical Engineering
  Depositing user:	Strathprints Administrator
  Date deposited:	10 Nov 2009 09:44
  Last modified:	08 Apr 2024 16:55
  URI:	https://strathprints.strath.ac.uk/id/eprint/9100