Foundry SiN as a platform for heterogeneous integration at visible wavelengths

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Smith, Jack A. and Li, Zhibo and Ghosh, Saprtarsi and Francis, Henry and Navickaite, Gabriele and McKnight, Loyd J. and Oliver, Rachel A. and Dawson, Martin D. and Strain, Michael J.; (2023) Foundry SiN as a platform for heterogeneous integration at visible wavelengths. In: 2023 IEEE Photonics Society Summer Topicals Meeting Series (SUM). 2023 IEEE Photonics Society Summer Topicals Meeting Series (SUM) . IEEE, Piscataway, NJ. ISBN 9798350347203 (https://doi.org/10.1109/sum57928.2023.10224480)

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Abstract

Silicon nitride (Si 3 N 4 ) is an excellent material platform for visible wavelength photonic integrated circuits, in particular, as a host for the heterogeneous/hybrid integration of complementary materials. In this work, we characterise the performance of the Si 3 N 4 from LIGENTEC as a base for hybrid integration.

ORCID iDs

Smith, Jack A., Li, Zhibo, Ghosh, Saprtarsi, Francis, Henry, Navickaite, Gabriele, McKnight, Loyd J., Oliver, Rachel A., Dawson, Martin D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989 and Strain, Michael J. ORCID logoORCID: https://orcid.org/0000-0002-9752-3144;
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