Continuous roller transfer-printing and automated metrology of >75,000 micro-LED pixels in a single shot

Margariti, Eleni and Quinn, Gemma and Jevtics, Dimitars and Guilhabert, Benoit and Dawson, Martin D. and Strain, Michael J. (2023) Continuous roller transfer-printing and automated metrology of >75,000 micro-LED pixels in a single shot. Optical Materials Express, 13 (8). pp. 2236-2250. ISSN 2159-3930 (https://doi.org/10.1364/OME.483657)

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Abstract

A continuous, single shot roller transfer printing process is presented for the large-scale hybrid integration of semiconductor devices. Transfer of a 320 × 240 pixel micro-LED array, representing >75,000 individual devices in a single shot with sub-micron relative position accuracy is demonstrated. The transfer printing process preserves the array geometry with pixel spatial location error less than 1 µm deviation from the as-designed layout. An automated sub-micron precision metrology system based on simple optical microscopy was developed to asses such large device populations and allow the assessment of yield.

ORCID iDs

Margariti, Eleni, Quinn, Gemma ORCID logoORCID: https://orcid.org/0000-0003-4487-9873, Jevtics, Dimitars ORCID logoORCID: https://orcid.org/0000-0002-6678-8334, Guilhabert, Benoit ORCID logoORCID: https://orcid.org/0000-0002-3986-8566, Dawson, Martin D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989 and Strain, Michael J. ORCID logoORCID: https://orcid.org/0000-0002-9752-3144;
CORE (COnnecting REpositories)