On-chip frequency tuning of fast resonant MEMS scanner
Janin, Paul and Uttamchandani, Deepak and Bauer, Ralf (2022) On-chip frequency tuning of fast resonant MEMS scanner. Journal of Microelectromechanical Systems, 31 (6). pp. 977-983. ISSN 1057-7157 (https://doi.org/10.1109/JMEMS.2022.3201381)
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Abstract
The development and characterisation of a piezoelectric actuated high-frequency MEMS scanning mirror with on-chip frequency tuning capability is reported. The resonant scanner operates at frequencies in excess of 140 kHz, generating scan angles of 10 ∘ and 6 ∘ for two orthogonal movement modes with 40 V actuation. On-chip frequency tuning is achieved through electrothermal actuators fabricated adjacent to the mirror main suspension. The electrothermal actuators produce a global and local temperature increase which changes the suspension stiffness and therefore the resonant frequency. A resonance frequency tuning range of up to 5.5 kHz is achieved, with tuning dominant on only one of the two orthogonal scan movement modes. This opens the possibility for precise tuning of a 2D Lissajous scan pattern using a single resonant MEMS scanner with dual orthogonal resonant modes producing full frame update rates up to 20 kHz while retaining the full angular range of both resonant movement modes.
ORCID iDs
Janin, Paul, Uttamchandani, Deepak ORCID: https://orcid.org/0000-0002-2362-4874 and Bauer, Ralf ORCID: https://orcid.org/0000-0001-7927-9435;-
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Item type: Article ID code: 82136 Dates: DateEventDecember 2022Published29 August 2022Published Online17 August 2022Accepted13 June 2022SubmittedSubjects: Technology > Electrical engineering. Electronics Nuclear engineering Department: Faculty of Science > Physics
Faculty of Engineering > Electronic and Electrical Engineering
Strategic Research Themes > Health and WellbeingDepositing user: Pure Administrator Date deposited: 01 Sep 2022 08:34 Last modified: 12 Dec 2024 13:20 Related URLs: URI: https://strathprints.strath.ac.uk/id/eprint/82136