Nanogrooving by using multi-tip diamond tools

Luo, Xichun and Tong, Zhen; Yan, Jiwang, ed. (2018) Nanogrooving by using multi-tip diamond tools. In: Micro and Nano Fabrication Technology. Springer, Cham, Switzerland, pp. 97-137. ISBN 9789811300974 (https://doi.org/10.1007/978-981-13-0098-1_4)

Abstract

This chapter introduces nano-grooving approach by using multi-tip diamond tools to generate nanostructures such as nano-gratings/nano-grooves on large substrates. It starts by briefing the work principle and history of this nanofabrication approach. It then introduces the machining mechanism, influences of processing parameters, and tool wear on the machined nanostructures. It concludes with a summary of research challenges, current research achievements, and future research directions to systematically establish this nanofabrication approach.

ORCID iDs

Luo, Xichun ORCID: https://orcid.org/0000-0002-5024-7058

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• Item metadata

  Item type:	Book Section
  ID code:	77065
  Dates:	Date Event 30 June 2018 Published
  Subjects:	Technology > Engineering (General). Civil engineering (General) > Engineering design
  Department:	Faculty of Engineering > Design, Manufacture and Engineering Management
  Depositing user:	Pure Administrator
  Date deposited:	12 Jul 2021 14:51
  Last modified:	11 Nov 2024 15:25
  URI:	https://strathprints.strath.ac.uk/id/eprint/77065