Refined calibration model for improving the orientation precision of electron backscatter diffraction maps
Winkelmann, Aimo and Nolze, Gert and Cios, Grzegorz and Tokarski, Tomasz and Bała, Piotr (2020) Refined calibration model for improving the orientation precision of electron backscatter diffraction maps. Materials, 13 (12). 2816. ISSN 1996-1944 (https://doi.org/10.3390/ma13122816)
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Abstract
For the precise determination of orientations in polycrystalline materials, electron backscatter diffraction (EBSD) requires a consistent calibration of the diffraction geometry in the scanning electron microscope (SEM). In the present paper, the variation of the projection center for the Kikuchi diffraction patterns which are measured by EBSD is calibrated using a projective transformation model for the SEM beam scan positions on the sample. Based on a full pattern matching approach between simulated and experimental Kikuchi patterns, individual projection center estimates are determined on a subgrid of the EBSD map, from which least-square fits to affine and projective transformations can be obtained. Reference measurements on single-crystalline silicon are used to quantify the orientation errors which result from different calibration models for the variation of the projection center.
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Item type: Article ID code: 74826 Dates: DateEvent23 June 2020Published16 June 2020AcceptedSubjects: Science > Physics Department: Faculty of Science > Physics Depositing user: Pure Administrator Date deposited: 08 Dec 2020 16:40 Last modified: 11 Nov 2024 12:55 Related URLs: URI: https://strathprints.strath.ac.uk/id/eprint/74826