Direct integration of micro-LEDs and a SPAD detector on a silicon CMOS chip for data communications and time-of-flight ranging

Carreira, J. F. C. and Griffiths, A. D. and Xie, E. and Guilhabert, B. J. E. and Herrnsdorf, J. and Henderson, R. K. and Gu, E. and Strain, M. J. and Dawson, M. D. (2020) Direct integration of micro-LEDs and a SPAD detector on a silicon CMOS chip for data communications and time-of-flight ranging. Optics Express, 28 (5). pp. 6909-6917. ISSN 1094-4087 (https://doi.org/10.1364/OE.384746)

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Abstract

We present integration of singulated micron-sized light emitting diodes (micro-LEDs) directly onto a silicon CMOS drive chip using a transfer printing method. An 8x8 micro-LED device array with individual control over each pixel is demonstrated with modulation bandwidths up to 50 MHz, limited by the large modulation depth of the driver chip. The 2 kHz frame rate CMOS driver also incorporates a Single Photon Avalanche Diode device thus allowing detection and transmission functionality on a single integrated chip. Visible light communications at data rates up to 1 Mbps, and time-of-flight ranging with cm-scale resolution are demonstrated using this hybrid integrated system.

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