Digital illumination in microscale direct-writing photolithography : challenges and trade-off

Stonehouse, Mark and Zhang, Yanchao and Guilhabert, Benoit and Watson, Ian and Gu, Erdan and Herrnsdorf, Johannes and Dawson, Martin (2018) Digital illumination in microscale direct-writing photolithography : challenges and trade-off. In: IEEE British and Irish Conference on Optics and Photonics, 2018-12-12 - 2018-12-14.

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Abstract

We explore the adaptation of existing photolithography technologies and introduce the potential for additional functionality in the form of structured light. By using a complementary metal oxide semiconductor (CMOS) controlled micropixellated light emitting diode (LED) array, features such as object recognition, tracking and characterization are possible in combination with photo-curing. We discuss the observed trade off between the delivered power density and resolution capability of the system due to the requirements of the additional features.

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• Item metadata

  Item type:	Conference or Workshop Item(Paper)
  ID code:	66701
  Dates:	Date Event 12 December 2018 Published 27 November 2018 Accepted
  Subjects:	Science > Physics > Optics. Light
  Department:	Faculty of Science > Physics Faculty of Science > Physics > Institute of Photonics
  Depositing user:	Pure Administrator
  Date deposited:	23 Jan 2019 13:55
  Last modified:	17 Apr 2024 01:03
  Related URLs:	Event
  URI:	https://strathprints.strath.ac.uk/id/eprint/66701