Hybrid integration of an evanescently coupled AlGaAs micro-disk resonator with a silicon waveguide by nanoscale-accurate transfer printing

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Guilhabert, B. and McPhillimy, J. and May, S. and Klitis, C. and Dawson, M. D. and Sorel, M. and Strain, M. J. (2018) Hybrid integration of an evanescently coupled AlGaAs micro-disk resonator with a silicon waveguide by nanoscale-accurate transfer printing. Optics Letters, 43 (20). pp. 4883-4886. ISSN 1539-4794 (https://doi.org/10.1364/OL.43.004883)

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Abstract

Hybrid integration of a III-V micro-disk resonator on a silicon-on-insulator waveguide platform is demonstrated. Transfer printing with nanoscale accuracy is used to micro-assemble an evanescently coupled all-pass micro-disk resonator, with a targeted coupler gap of 100 nm using pre-fabricated AlGaAs and silicon components. Transmission measurements show hybrid resonances with a loaded Q-factor of 7x103 and cavity finesse of over 100.

ORCID iDs

Guilhabert, B. ORCID logoORCID: https://orcid.org/0000-0002-3986-8566, McPhillimy, J. ORCID logoORCID: https://orcid.org/0000-0003-3415-3796, May, S., Klitis, C., Dawson, M. D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989, Sorel, M. and Strain, M. J. ORCID logoORCID: https://orcid.org/0000-0002-9752-3144;
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