Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers

Kusch, Jonas and Flockhart, Gordon M.H. and Bauer, Ralf and Uttamchandani, Deepak; (2018) Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers. In: 2018 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, CHE. ISBN 9781509063741 (https://doi.org/10.1109/OMN.2018.8454582)

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Abstract

Two MEMS thin film aluminium nitride ultrasound transducer array designs for photoacoustic sensing applications are presented. They are characterized using the pitch and catch technique and photoacoustic excitation. The results of both approaches are subsequently compared.

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Item metadata

Item type:	Book Section
ID code:	64450
Dates:	Date Event 6 September 2018 Published 25 May 2018 Accepted
Notes:	© 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
Department:	Faculty of Engineering > Electronic and Electrical Engineering Technology and Innovation Centre > Sensors and Asset Management Faculty of Engineering
Depositing user:	Pure Administrator
Date deposited:	14 Jun 2018 08:57
Last modified:	08 Apr 2024 13:58
URI:	https://strathprints.strath.ac.uk/id/eprint/64450

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