Development and optimization of durable microelectrodes for quantitative electroanalysis in molten salt

Blair, Ewen O. and Corrigan, Damion K. and Terry, Jonathan G. and Mount, Andrew R. and Walton, Anthony J. (2015) Development and optimization of durable microelectrodes for quantitative electroanalysis in molten salt. Journal of Microelectromechanical Systems, 24 (5). pp. 1346-1354. ISSN 1057-7157 (https://doi.org/10.1109/JMEMS.2015.2399106)

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Abstract

Microfabricated square electrodes with finely controlled highly reproducible dimensions have been developed for electrochemical analysis of high-temperature molten salt (MS). These microelectrodes have been fabricated using photolithographic techniques on silicon wafers and have been designed for operation in lithium chloride/potassium chloride eutectic salt at and ~500 °C. The electrodes are constructed from a series of patterned layers, and their development has involved a systematic study and optimization of a number of different material combinations. This has resulted in a process for making electrodes that represents a step change in capability, delivering the first robust microelectrode device capable of quantitative electroanalysis in a MS system at 500 °C.