Real-time simulations and experiments on ultrahigh frequency surface waves in micro-structured phononic crystals

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Veres, I.A. and Profunser, Dieter M. and Wright, Oliver B. and Matsuda, Osamu and Lang, Udo (2009) Real-time simulations and experiments on ultrahigh frequency surface waves in micro-structured phononic crystals. In: 2009 IEEE Ultrasonics Symposium, 2009-09-20 - 2009-09-23. (https://doi.org/10.1109/ULTSYM.2009.5441862)

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Abstract

We investigate experimentally and by numerical simulation the interaction between ultrahigh frequency surface acoustic waves (SAW) and periodic microstructures. We use both one-dimensional (1D) phononic crystals consisting of copper lines embedded in silicon oxide and 2D phononic crystals consisting of air-filled holes etched as a square lattice in a silicon substrate. Experimental results obtained by ultrashort pulsed optical excitation and interferometric detection are compared to time-domain finite element (FEM) simulations of the propagating ultrahigh frequency SAW with frequency components up to ~1 GHz in these phononic crystals, allowing the investigation of SAW scattering and phononic band structure. Good agreement was obtained between simulation and experiment.

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