A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators

Li, L. and Bauer, R. and Brown, G. and Uttamchandani, D.; (2011) A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators. In: OMN2011. IEEE, TUR, pp. 163-164. ISBN 9781457703362 (https://doi.org/10.1109/OMEMS.2011.6031038)

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Abstract

A hybrid two-axis scanner combining both electrostatic and electrothermal actuators was fabricated using the SOIMUMPs. Experimental evaluation shows the device is capable of three degree-of-freedom movement, and can be programmed to generate two-axis scan patterns.

ORCID iDs

Li, L., Bauer, R. ORCID logoORCID: https://orcid.org/0000-0001-7927-9435, Brown, G. and Uttamchandani, D. ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;
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