MEMS-actuated wavelength drop filter based on microsphere whispering gallery modes

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Blue, Robert and Li, Li and Flockhart, Gordon M H and Uttamchandani, Deepak (2011) MEMS-actuated wavelength drop filter based on microsphere whispering gallery modes. Journal of Micromechanics and Microengineering, 21 (11). 115020. ISSN 0960-1317 (https://doi.org/10.1088/0960-1317/21/11/115020)

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Abstract

MEMS-enabled tuneable optical coupling between optical microsphere resonators and optical fibre waveguides is reported. We describe the design, fabrication and experimental characterization of a MEMS platform, based on electrothermal actuators, which controls the resonator-to-waveguide separation. We compare the simulated and experimental displacements of the actuators in an unloaded and loaded state, where the load is a 1 mm optical spherical resonator. We then demonstrate the proof of concept application of selective wavelength dropping using the MEMS platform by modulating the coupling between the spherical resonator and a tapered optical fibre waveguide.

ORCID iDs

Blue, Robert ORCID logoORCID: https://orcid.org/0000-0002-8598-5210, Li, Li, Flockhart, Gordon M H ORCID logoORCID: https://orcid.org/0000-0002-8777-7511 and Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;
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