Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI

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Chaehoi, A. and Weiland, D. and Adamson, R. and Begbie, Mark and Lowrie, C. and Desmulliez, M.P.Y. and Brown, J.G. and Li, L. and Uttamchandani, D.G. (2008) Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI. In: The 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC), 1900-01-01. (Unpublished)

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Abstract

This paper discusses the design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI.

ORCID iDs

Chaehoi, A., Weiland, D., Adamson, R., Begbie, Mark, Lowrie, C., Desmulliez, M.P.Y., Brown, J.G. ORCID logoORCID: https://orcid.org/0000-0003-2857-5001, Li, L. and Uttamchandani, D.G. ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;
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