Foundry SiN as a platform for heterogeneous integration at visible wavelengths

Smith, Jack A. and Li, Zhibo and Ghosh, Saprtarsi and Francis, Henry and Navickaite, Gabriele and McKnight, Loyd J. and Oliver, Rachel A. and Dawson, Martin D. and Strain, Michael J.; (2023) Foundry SiN as a platform for heterogeneous integration at visible wavelengths. In: 2023 IEEE Photonics Society Summer Topicals Meeting Series (SUM). 2023 IEEE Photonics Society Summer Topicals Meeting Series (SUM) . IEEE, Piscataway, NJ. ISBN 9798350347203 (https://doi.org/10.1109/sum57928.2023.10224480)

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Abstract

Silicon nitride (Si 3 N 4 ) is an excellent material platform for visible wavelength photonic integrated circuits, in particular, as a host for the heterogeneous/hybrid integration of complementary materials. In this work, we characterise the performance of the Si 3 N 4 from LIGENTEC as a base for hybrid integration.

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