Foundry SiN as a platform for heterogeneous integration at visible wavelengths
Smith, Jack A. and Li, Zhibo and Ghosh, Saprtarsi and Francis, Henry and Navickaite, Gabriele and McKnight, Loyd J. and Oliver, Rachel A. and Dawson, Martin D. and Strain, Michael J.; (2023) Foundry SiN as a platform for heterogeneous integration at visible wavelengths. In: 2023 IEEE Photonics Society Summer Topicals Meeting Series (SUM). 2023 IEEE Photonics Society Summer Topicals Meeting Series (SUM) . IEEE, Piscataway, NJ. ISBN 9798350347203 (https://doi.org/10.1109/sum57928.2023.10224480)
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Abstract
Silicon nitride (Si 3 N 4 ) is an excellent material platform for visible wavelength photonic integrated circuits, in particular, as a host for the heterogeneous/hybrid integration of complementary materials. In this work, we characterise the performance of the Si 3 N 4 from LIGENTEC as a base for hybrid integration.
ORCID iDs
Smith, Jack A., Li, Zhibo, Ghosh, Saprtarsi, Francis, Henry, Navickaite, Gabriele, McKnight, Loyd J., Oliver, Rachel A., Dawson, Martin D. ORCID: https://orcid.org/0000-0002-6639-2989 and Strain, Michael J. ORCID: https://orcid.org/0000-0002-9752-3144;-
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Item type: Book Section ID code: 86695 Dates: DateEvent23 August 2023Published1 May 2023AcceptedSubjects: Technology > Electrical engineering. Electronics Nuclear engineering Department: Faculty of Science > Physics > Institute of Photonics
Faculty of Science > PhysicsDepositing user: Pure Administrator Date deposited: 08 Sep 2023 08:45 Last modified: 06 Oct 2024 00:19 URI: https://strathprints.strath.ac.uk/id/eprint/86695