Continuous roller transfer-printing and automated metrology of >75,000 micro-LED pixels in a single shot
Margariti, Eleni and Quinn, Gemma and Jevtics, Dimitars and Guilhabert, Benoit and Dawson, Martin D. and Strain, Michael J. (2023) Continuous roller transfer-printing and automated metrology of >75,000 micro-LED pixels in a single shot. Optical Materials Express, 13 (8). pp. 2236-2250. ISSN 2159-3930 (https://doi.org/10.1364/OME.483657)
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Abstract
A continuous, single shot roller transfer printing process is presented for the large-scale hybrid integration of semiconductor devices. Transfer of a 320 × 240 pixel micro-LED array, representing >75,000 individual devices in a single shot with sub-micron relative position accuracy is demonstrated. The transfer printing process preserves the array geometry with pixel spatial location error less than 1 µm deviation from the as-designed layout. An automated sub-micron precision metrology system based on simple optical microscopy was developed to asses such large device populations and allow the assessment of yield.
ORCID iDs
Margariti, Eleni, Quinn, Gemma ORCID: https://orcid.org/0000-0003-4487-9873, Jevtics, Dimitars ORCID: https://orcid.org/0000-0002-6678-8334, Guilhabert, Benoit ORCID: https://orcid.org/0000-0002-3986-8566, Dawson, Martin D. ORCID: https://orcid.org/0000-0002-6639-2989 and Strain, Michael J. ORCID: https://orcid.org/0000-0002-9752-3144;-
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Item type: Article ID code: 86136 Dates: DateEvent13 July 2023Published17 June 2023AcceptedSubjects: Science > Physics Department: Faculty of Science > Physics
Faculty of Science > Physics > Institute of Photonics
Technology and Innovation Centre > PhotonicsDepositing user: Pure Administrator Date deposited: 13 Jul 2023 09:12 Last modified: 03 Dec 2024 01:25 URI: https://strathprints.strath.ac.uk/id/eprint/86136