Continuous roller transfer-printing and automated metrology of >75,000 micro-LED pixels in a single shot

Margariti, Eleni and Quinn, Gemma and Jevtics, Dimitars and Guilhabert, Benoit and Dawson, Martin D. and Strain, Michael J. (2023) Continuous roller transfer-printing and automated metrology of >75,000 micro-LED pixels in a single shot. Optical Materials Express, 13 (8). pp. 2236-2250. ISSN 2159-3930 (https://doi.org/10.1364/OME.483657)

[thumbnail of Margariti-etal-OME-2023-Continuous-roller-transfer-printing-and-automated-metrology]
Preview
 Text. Filename: Margariti_etal_OME_2023_Continuous_roller_transfer_printing_and_automated_metrology.pdf
Final Published Version
License: Creative Commons Attribution 4.0 logo
Download (6MB)| Preview

Abstract

A continuous, single shot roller transfer printing process is presented for the large-scale hybrid integration of semiconductor devices. Transfer of a 320 × 240 pixel micro-LED array, representing >75,000 individual devices in a single shot with sub-micron relative position accuracy is demonstrated. The transfer printing process preserves the array geometry with pixel spatial location error less than 1 µm deviation from the as-designed layout. An automated sub-micron precision metrology system based on simple optical microscopy was developed to asses such large device populations and allow the assessment of yield.

CORE (COnnecting REpositories)