Refined calibration model for improving the orientation precision of electron backscatter diffraction maps

Winkelmann, Aimo and Nolze, Gert and Cios, Grzegorz and Tokarski, Tomasz and Bała, Piotr (2020) Refined calibration model for improving the orientation precision of electron backscatter diffraction maps. Materials, 13 (12). 2816. ISSN 1996-1944 (https://doi.org/10.3390/ma13122816)

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Abstract

For the precise determination of orientations in polycrystalline materials, electron backscatter diffraction (EBSD) requires a consistent calibration of the diffraction geometry in the scanning electron microscope (SEM). In the present paper, the variation of the projection center for the Kikuchi diffraction patterns which are measured by EBSD is calibrated using a projective transformation model for the SEM beam scan positions on the sample. Based on a full pattern matching approach between simulated and experimental Kikuchi patterns, individual projection center estimates are determined on a subgrid of the EBSD map, from which least-square fits to affine and projective transformations can be obtained. Reference measurements on single-crystalline silicon are used to quantify the orientation errors which result from different calibration models for the variation of the projection center.

  • Item type:Article
    ID code:74826
    Dates:
    Date
    Event
    23 June 2020
    Published
    16 June 2020
    Accepted
    Subjects:Science > Physics
    Department:Faculty of Science > Physics
    Depositing user: Pure Administrator
    Date deposited:08 Dec 2020 16:40
    Last modified:24 Apr 2024 00:23
    Related URLs:
    URI:https://strathprints.strath.ac.uk/id/eprint/74826
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