Digital illumination in microscale direct-writing photolithography : challenges and trade-off

Stonehouse, Mark and Zhang, Yanchao and Guilhabert, Benoit and Watson, Ian and Gu, Erdan and Herrnsdorf, Johannes and Dawson, Martin (2018) Digital illumination in microscale direct-writing photolithography : challenges and trade-off. In: IEEE British and Irish Conference on Optics and Photonics, 2018-12-12 - 2018-12-14.

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Abstract

We explore the adaptation of existing photolithography technologies and introduce the potential for additional functionality in the form of structured light. By using a complementary metal oxide semiconductor (CMOS) controlled micropixellated light emitting diode (LED) array, features such as object recognition, tracking and characterization are possible in combination with photo-curing. We discuss the observed trade off between the delivered power density and resolution capability of the system due to the requirements of the additional features.

ORCID iDs

Stonehouse, Mark, Zhang, Yanchao, Guilhabert, Benoit ORCID logoORCID: https://orcid.org/0000-0002-3986-8566, Watson, Ian ORCID logoORCID: https://orcid.org/0000-0002-8797-3993, Gu, Erdan ORCID logoORCID: https://orcid.org/0000-0002-7607-9902, Herrnsdorf, Johannes ORCID logoORCID: https://orcid.org/0000-0002-3856-5782 and Dawson, Martin ORCID logoORCID: https://orcid.org/0000-0002-6639-2989;
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