Hybrid integration of an evanescently coupled AlGaAs micro-disk resonator with a silicon waveguide by nanoscale-accurate transfer printing

Guilhabert, B. and McPhillimy, J. and May, S. and Klitis, C. and Dawson, M. D. and Sorel, M. and Strain, M. J. (2018) Hybrid integration of an evanescently coupled AlGaAs micro-disk resonator with a silicon waveguide by nanoscale-accurate transfer printing. Optics Letters, 43 (20). pp. 4883-4886. ISSN 1539-4794 (https://doi.org/10.1364/OL.43.004883)

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Abstract

Hybrid integration of a III-V micro-disk resonator on a silicon-on-insulator waveguide platform is demonstrated. Transfer printing with nanoscale accuracy is used to micro-assemble an evanescently coupled all-pass micro-disk resonator, with a targeted coupler gap of 100 nm using pre-fabricated AlGaAs and silicon components. Transmission measurements show hybrid resonances with a loaded Q-factor of 7x103 and cavity finesse of over 100.

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