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Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers

Kusch, Jonas and Flockhart, Gordon M.H. and Bauer, Ralf and Uttamchandani, Deepak (2018) Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers. In: Conference on Optical MEMS and Nanophotonics 2018, 2018-07-29 - 2018-08-02, Ecole Polyechnique Fédérale de Lausanne. (In Press)

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Abstract

Two MEMS thin film aluminium nitride ultrasound transducer array designs for photoacoustic sensing applications are presented. They are characterized using the pitch and catch technique and photoacoustic excitation. The results of both approaches are subsequently compared.

Item type: Conference or Workshop Item (Paper)
ID code: 64450
Keywords: ultrasound, MEMS, transducer, characterization, photoacoustics, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering
Subjects: Technology > Electrical engineering. Electronics Nuclear engineering
Department: Faculty of Engineering > Electronic and Electrical Engineering
Technology and Innovation Centre > Sensors and Asset Management
Faculty of Engineering
Depositing user: Pure Administrator
Date deposited: 14 Jun 2018 08:57
Last modified: 06 Feb 2019 05:37
Related URLs:
URI: https://strathprints.strath.ac.uk/id/eprint/64450
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