Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers

Kusch, Jonas and Flockhart, Gordon M.H. and Bauer, Ralf and Uttamchandani, Deepak; (2018) Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers. In: 2018 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, CHE. ISBN 9781509063741

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    Abstract

    Two MEMS thin film aluminium nitride ultrasound transducer array designs for photoacoustic sensing applications are presented. They are characterized using the pitch and catch technique and photoacoustic excitation. The results of both approaches are subsequently compared.

    ORCID iDs

    Kusch, Jonas ORCID logoORCID: https://orcid.org/0000-0003-0921-9167, Flockhart, Gordon M.H. ORCID logoORCID: https://orcid.org/0000-0002-8777-7511, Bauer, Ralf ORCID logoORCID: https://orcid.org/0000-0001-7927-9435 and Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;