Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers

Kusch, Jonas and Flockhart, Gordon M.H. and Bauer, Ralf and Uttamchandani, Deepak (2018) Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers. In: 2018 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, CHE. ISBN 9781509063741

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    Abstract

    Two MEMS thin film aluminium nitride ultrasound transducer array designs for photoacoustic sensing applications are presented. They are characterized using the pitch and catch technique and photoacoustic excitation. The results of both approaches are subsequently compared.

    Author(s):Kusch, Jonas ORCID logoORCID: https://orcid.org/0000-0003-0921-9167, Flockhart, Gordon M.H. ORCID logoORCID: https://orcid.org/0000-0002-8777-7511, Bauer, Ralf ORCID logoORCID: https://orcid.org/0000-0001-7927-9435 and Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874
    Item type:Book Section
    ID code:64450
    Notes:© 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
    Keywords:ultrasound, MEMS, transducer, characterization, photoacoustics, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering
    Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
    Department:Faculty of Engineering > Electronic and Electrical Engineering
    Technology and Innovation Centre > Sensors and Asset Management
    Faculty of Engineering
    Depositing user: Pure Administrator
    Date deposited:14 Jun 2018 08:57
    Last modified:16 Jan 2020 23:56
    URI:https://strathprints.strath.ac.uk/id/eprint/64450
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