Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers
Kusch, Jonas and Flockhart, Gordon M.H. and Bauer, Ralf and Uttamchandani, Deepak; (2018) Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers. In: 2018 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, CHE. ISBN 9781509063741
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Official URL: https://doi.org/10.1109/OMN.2018.8454582
Abstract
Two MEMS thin film aluminium nitride ultrasound transducer array designs for photoacoustic sensing applications are presented. They are characterized using the pitch and catch technique and photoacoustic excitation. The results of both approaches are subsequently compared.
ORCID iDs
Kusch, Jonas
ORCID: https://orcid.org/0000-0003-0921-9167, Flockhart, Gordon M.H. ORCID: https://orcid.org/0000-0002-8777-7511, Bauer, Ralf ORCID: https://orcid.org/0000-0001-7927-9435 and Uttamchandani, Deepak ORCID: https://orcid.org/0000-0002-2362-4874;
Item type: Book Section ID code: 64450 Dates: DateEvent6 September 2018Published25 May 2018AcceptedNotes: © 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. Keywords: ultrasound, MEMS, transducer, characterization, photoacoustics, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering Subjects: Technology > Electrical engineering. Electronics Nuclear engineering Department: Faculty of Engineering > Electronic and Electrical Engineering
Technology and Innovation Centre > Sensors and Asset Management
Faculty of EngineeringDepositing user: Pure Administrator Date deposited: 14 Jun 2018 08:57 Last modified: 11 Feb 2021 09:45 URI: https://strathprints.strath.ac.uk/id/eprint/64450
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