Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers

Kusch, Jonas and Flockhart, Gordon M.H. and Bauer, Ralf and Uttamchandani, Deepak; (2018) Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers. In: 2018 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, CHE. ISBN 9781509063741

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    Abstract

    Two MEMS thin film aluminium nitride ultrasound transducer array designs for photoacoustic sensing applications are presented. They are characterized using the pitch and catch technique and photoacoustic excitation. The results of both approaches are subsequently compared.

    ORCID iDs

    Kusch, Jonas ORCID logoORCID: https://orcid.org/0000-0003-0921-9167, Flockhart, Gordon M.H. ORCID logoORCID: https://orcid.org/0000-0002-8777-7511, Bauer, Ralf ORCID logoORCID: https://orcid.org/0000-0001-7927-9435 and Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;
    • Item type:Book Section
      ID code:64450
      Dates:
      Date
      Event
      6 September 2018
      Published
      25 May 2018
      Accepted
      Notes:© 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
      Keywords:ultrasound, MEMS, transducer, characterization, photoacoustics, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering
      Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
      Department:Faculty of Engineering > Electronic and Electrical Engineering
      Technology and Innovation Centre > Sensors and Asset Management
      Faculty of Engineering
      Depositing user: Pure Administrator
      Date deposited:14 Jun 2018 08:57
      Last modified:23 Sep 2021 01:54
      URI:https://strathprints.strath.ac.uk/id/eprint/64450
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