Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers
Kusch, Jonas and Flockhart, Gordon M.H. and Bauer, Ralf and Uttamchandani, Deepak (2018) Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers. In: Conference on Optical MEMS and Nanophotonics 2018, 2018-07-29 - 2018-08-02, Ecole Polyechnique Fédérale de Lausanne. (In Press)
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Abstract
Two MEMS thin film aluminium nitride ultrasound transducer array designs for photoacoustic sensing applications are presented. They are characterized using the pitch and catch technique and photoacoustic excitation. The results of both approaches are subsequently compared.
Item type: | Conference or Workshop Item (Paper) |
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ID code: | 64450 |
Keywords: | ultrasound, MEMS, transducer, characterization, photoacoustics, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering |
Subjects: | Technology > Electrical engineering. Electronics Nuclear engineering |
Department: | Faculty of Engineering > Electronic and Electrical Engineering Technology and Innovation Centre > Sensors and Asset Management Faculty of Engineering |
Depositing user: | Pure Administrator |
Date deposited: | 14 Jun 2018 08:57 |
Last modified: | 06 Feb 2019 05:37 |
Related URLs: | |
URI: | https://strathprints.strath.ac.uk/id/eprint/64450 |
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