Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers

Kusch, Jonas and Flockhart, Gordon M.H. and Bauer, Ralf and Uttamchandani, Deepak (2018) Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers. In: Conference on Optical MEMS and Nanophotonics 2018, 2018-07-29 - 2018-08-02, Ecole Polyechnique Fédérale de Lausanne. (In Press)

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    Abstract

    Two MEMS thin film aluminium nitride ultrasound transducer array designs for photoacoustic sensing applications are presented. They are characterized using the pitch and catch technique and photoacoustic excitation. The results of both approaches are subsequently compared.

    Author(s):Kusch, Jonas ORCID logoORCID: https://orcid.org/0000-0003-0921-9167, Flockhart, Gordon M.H. ORCID logoORCID: https://orcid.org/0000-0002-8777-7511, Bauer, Ralf ORCID logoORCID: https://orcid.org/0000-0001-7927-9435 and Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874
    Item type:Conference or Workshop Item(Paper)
    ID code:64450
    Keywords:ultrasound, MEMS, transducer, characterization, photoacoustics, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering
    Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
    Department:Faculty of Engineering > Electronic and Electrical Engineering
    Technology and Innovation Centre > Sensors and Asset Management
    Faculty of Engineering
    Depositing user: Pure Administrator
    Date deposited:14 Jun 2018 08:57
    Last modified:29 Aug 2019 11:24
    Related URLs:
    URI:https://strathprints.strath.ac.uk/id/eprint/64450
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