Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers

Kusch, Jonas and Flockhart, Gordon M.H. and Bauer, Ralf and Uttamchandani, Deepak; (2018) Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers. In: 2018 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, CHE. ISBN 9781509063741 (https://doi.org/10.1109/OMN.2018.8454582)

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Abstract

Two MEMS thin film aluminium nitride ultrasound transducer array designs for photoacoustic sensing applications are presented. They are characterized using the pitch and catch technique and photoacoustic excitation. The results of both approaches are subsequently compared.

ORCID iDs

Kusch, Jonas ORCID: https://orcid.org/0000-0003-0921-9167

Flockhart, Gordon M.H. ORCID: https://orcid.org/0000-0002-8777-7511

Bauer, Ralf ORCID: https://orcid.org/0000-0001-7927-9435

Uttamchandani, Deepak ORCID: https://orcid.org/0000-0002-2362-4874

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  Item type:	Book Section
  ID code:	64450
  Dates:	Date Event 6 September 2018 Published 25 May 2018 Accepted
  Notes:	© 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
  Department:	Faculty of Engineering > Electronic and Electrical Engineering Technology and Innovation Centre > Sensors and Asset Management Faculty of Engineering
  Depositing user:	Pure Administrator
  Date deposited:	14 Jun 2018 08:57
  Last modified:	11 Nov 2024 15:20
  URI:	https://strathprints.strath.ac.uk/id/eprint/64450