Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers
Liu, Hangyu and Reilly, Sean and Herrnsdorf, Johannes and Xie, Enyuan and Savitski, Vasili G. and Kemp, Alan J. and Gu, Erdan and Dawson, Martin D. (2016) Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers. Diamond and Related Materials, 65. pp. 37-41. ISSN 0925-9635 (https://doi.org/10.1016/j.diamond.2016.01.016)
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Abstract
The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.
ORCID iDs
Liu, Hangyu, Reilly, Sean ORCID: https://orcid.org/0000-0002-4506-7909, Herrnsdorf, Johannes ORCID: https://orcid.org/0000-0002-3856-5782, Xie, Enyuan ORCID: https://orcid.org/0000-0001-7776-8091, Savitski, Vasili G. ORCID: https://orcid.org/0000-0001-5261-1186, Kemp, Alan J. ORCID: https://orcid.org/0000-0002-1076-3138, Gu, Erdan ORCID: https://orcid.org/0000-0002-7607-9902 and Dawson, Martin D. ORCID: https://orcid.org/0000-0002-6639-2989;-
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Item type: Article ID code: 55491 Dates: DateEvent1 May 2016Published22 January 2016Published Online20 January 2016AcceptedSubjects: Technology > Engineering (General). Civil engineering (General) Department: Faculty of Science > Physics > Institute of Photonics Depositing user: Pure Administrator Date deposited: 09 Feb 2016 09:59 Last modified: 18 Oct 2024 00:25 Related URLs: URI: https://strathprints.strath.ac.uk/id/eprint/55491