Ellipsometric characterization of amorphous and polycrystalline silicon films deposited using a single wafer reactor

Borghesi, A. and Giardini, M. E. and Marazzi, M. and Sassella, A. and De Santi, G. (1997) Ellipsometric characterization of amorphous and polycrystalline silicon films deposited using a single wafer reactor. Applied Physics Letters, 70 (7). pp. 892-894. ISSN 0003-6951

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    Abstract

    The optical functions of amorphous and polycrystalline silicon thin films deposited on single oxidized silicon substrates by chemical vapor deposition in a wide range of deposition temperatures have been determined using spectroscopic ellipsometry. The data analysis is performed by direct inversion of the experimental spectra, therefore, obtaining results independent of any film modeling. The optical results indicate that the film structure changes as the deposition temperature increases from amorphous to polycrystalline with different grain size and distribution.

    ORCID iDs

    Borghesi, A., Giardini, M. E. ORCID logoORCID: https://orcid.org/0000-0003-4849-9683, Marazzi, M., Sassella, A. and De Santi, G.;
    • Item type:Article
      ID code:47624
      Dates:
      Date
      Event
      17 February 1997
      Published
      30 November 1996
      Accepted
      Keywords:ellipsometric characterization, amorphous, polycrystalline silicon films, single wafer reactor, optical functions, single oxidizedsilicon substrates, deposition temperatures, spectroscopicellipsometry, silicon, polycrystals, thin films, amorphous semiconductors, thin film deposition, Bioengineering, Optics. Light, Electronic, Optical and Magnetic Materials, Condensed Matter Physics, Biomedical Engineering
      Subjects:Technology > Engineering (General). Civil engineering (General) > Bioengineering
      Science > Physics > Optics. Light
      Department:Faculty of Engineering > Biomedical Engineering
      Depositing user: Pure Administrator
      Date deposited:24 Apr 2014 09:16
      Last modified:23 Sep 2021 04:33
      URI:https://strathprints.strath.ac.uk/id/eprint/47624
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