Fabricating high-density microarrays for retinal recording

Mathieson, K and Cunningham, W and Marchal, J and Melone, J and Horn, M and O'Shea, V and Smith, KM and Litke, A and Chichilnisky, EJ and Rahman, M (2003) Fabricating high-density microarrays for retinal recording. Microelectronic Engineering, 67-8. pp. 520-527. ISSN 0167-9317 (https://doi.org/10.1016/S0167-9317(03)00109-6)

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Abstract

Understanding how the retina encodes the visual scene is a problem, which requires large area, high-density microelectrode arrays to solve. The correlated signals that emerge from the output (ganglion) cells of the retina form a code, which is not well understood. We use a combination of electron beam lithography, photolithography and dry-etch pattern transfer to realise a 519-electrode array in the transparent conductor indium tin oxide (ITO). The electrodes are spaced at 60 μm in a hexagonal close-packed geometry. A mix and match lithography procedure is utilised, whereby the high-density inner region is fabricated using electron beam lithography whilst the outer sections are realised by photolithography. Reactive ion etching (RIE), using CH4/H2, of the ITO forms the array structure and SF6 RIE allows resist removal and patterning of vias through a plasma deposited Si3N4 protective layer. The electrical properties of the ITO layer are unaffected by the etching procedures. A reliable method for achieving low-impedance electroplated platinum electrodes has been employed to yield electrode impedances of ∼20 kΩ. An array fabricated using these dry-etch techniques is shown to record action potentials from live retinal tissue in neurophysiological experiments.

ORCID iDs

Mathieson, K ORCID logoORCID: https://orcid.org/0000-0002-9517-8076, Cunningham, W, Marchal, J, Melone, J, Horn, M, O'Shea, V, Smith, KM, Litke, A, Chichilnisky, EJ and Rahman, M;
  • Item type:Article
    ID code:37539
    Dates:
    Date
    Event
    1 June 2003
    Published
    Notes:28th International Conference on Micro- and Nano-Engineering, LUGANO, SWITZERLAND, SEP 16-19, 2002
    Subjects:Science > Physics > Optics. Light
    Department:Faculty of Science > Physics > Institute of Photonics
    Depositing user: Pure Administrator
    Date deposited:09 Feb 2012 15:57
    Last modified:11 Nov 2024 10:04
    URI:https://strathprints.strath.ac.uk/id/eprint/37539
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