Large cross-section edge-coupled diamond waveguides

Zhang, Yanfeng and McKnight, Loyd and Tian, Zhaoshuo and Calvez, Stephane and Gu, Erdan and Dawson, Martin D. (2011) Large cross-section edge-coupled diamond waveguides. Diamond and Related Materials, 20 (4). pp. 564-567. ISSN 0925-9635 (https://doi.org/10.1016/j.diamond.2011.03.002)

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Abstract

A new approach to fabricate large cross-section edge-coupled waveguides on free-standing thin diamond substrates is reported. Combining inkjet printing of photoresist multilayers with photolithographic patterning, both edge and 'coffee stain' effects were successfully eliminated, allowing the fabrication of well-defined, millimetre-scale uniform photoresist micro-stripes which extend to the very edge of the diamond substrate. Subsequent transfer of these micro-stripe structures into diamond by inductively coupled plasma (ICP) etching allowed long edge-coupled waveguides in diamond to be made. Guided wave propagation in these diamond waveguides was also confirmed. (C) 2011 Elsevier B.V. All rights reserved.

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