On a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality

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Pincik, E. and Falcony, C. and Gleskova, H. and Brunner, R. and Ortega, L. and Nadazdy, V. and Mullerova, J. and Gmucova, K. and Durny, R.; (2002) On a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality. In: Book of abstracts. Sociedad Mexicana de Ciencia de Superficies Y Vacío A.C., MEX.

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Abstract

A chapter on a transformation of a-Si:H surface due to very low-energy particle impacts to very thin insulating overlayer of device quality

ORCID iDs

Pincik, E., Falcony, C., Gleskova, H. ORCID logoORCID: https://orcid.org/0000-0001-7195-9639, Brunner, R., Ortega, L., Nadazdy, V., Mullerova, J., Gmucova, K. and Durny, R.;
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