Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI
Chaehoi, A. and Weiland, D. and Adamson, R. and Begbie, Mark and Lowrie, C. and Desmulliez, M.P.Y. and Brown, J.G. and Li, L. and Uttamchandani, D.G. (2008) Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI. In: The 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC), 1900-01-01. (Unpublished)
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This paper discusses the design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI.
ORCID iDs
Chaehoi, A., Weiland, D., Adamson, R., Begbie, Mark, Lowrie, C., Desmulliez, M.P.Y., Brown, J.G.
ORCID: https://orcid.org/0000-0003-2857-5001, Li, L. and Uttamchandani, D.G. ORCID: https://orcid.org/0000-0002-2362-4874;
Item type: Conference or Workshop Item(Paper) ID code: 12823 Dates: DateEventSeptember 2008PublishedKeywords: monolithic 3-axis piezoresistive accelerometer, Electrical engineering. Electronics Nuclear engineering Subjects: Technology > Electrical engineering. Electronics Nuclear engineering Department: Faculty of Engineering > Electronic and Electrical Engineering Depositing user: Strathprints Administrator Date deposited: 03 Aug 2010 14:05 Last modified: 07 May 2021 00:07 Related URLs: URI: https://strathprints.strath.ac.uk/id/eprint/12823
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