Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI
Chaehoi, A. and Weiland, D. and Adamson, R. and Begbie, Mark and Lowrie, C. and Desmulliez, M.P.Y. and Brown, J.G. and Li, L. and Uttamchandani, D.G. (2008) Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI. In: The 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC), 1900-01-01. (Unpublished)
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This paper discusses the design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI.
Creators(s): |
Chaehoi, A., Weiland, D., Adamson, R., Begbie, Mark, Lowrie, C., Desmulliez, M.P.Y., Brown, J.G. ![]() ![]() | Item type: | Conference or Workshop Item(Paper) |
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ID code: | 12823 |
Keywords: | monolithic 3-axis piezoresistive accelerometer, Electrical engineering. Electronics Nuclear engineering |
Subjects: | Technology > Electrical engineering. Electronics Nuclear engineering |
Department: | Faculty of Engineering > Electronic and Electrical Engineering |
Depositing user: | Strathprints Administrator |
Date deposited: | 03 Aug 2010 14:05 |
Last modified: | 06 Nov 2020 06:35 |
Related URLs: | |
URI: | https://strathprints.strath.ac.uk/id/eprint/12823 |
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