Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI

Chaehoi, A. and Weiland, D. and Adamson, R. and Begbie, Mark and Lowrie, C. and Desmulliez, M.P.Y. and Brown, J.G. and Li, L. and Uttamchandani, D.G. (2008) Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI. In: The 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC), 1900-01-01. (Unpublished)

Abstract

This paper discusses the design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI.

ORCID iDs

Brown, J.G. ORCID: https://orcid.org/0000-0003-2857-5001

Uttamchandani, D.G. ORCID: https://orcid.org/0000-0002-2362-4874

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• Item metadata

  Item type:	Conference or Workshop Item(Paper)
  ID code:	12823
  Dates:	Date Event September 2008 Published
  Keywords:	monolithic 3-axis piezoresistive accelerometer, Electrical engineering. Electronics Nuclear engineering
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
  Department:	Faculty of Engineering > Electronic and Electrical Engineering
  Depositing user:	Strathprints Administrator
  Date deposited:	03 Aug 2010 14:05
  Last modified:	06 Aug 2021 01:13
  Related URLs:	Event
  URI:	https://strathprints.strath.ac.uk/id/eprint/12823