Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI

Chaehoi, A. and Weiland, D. and Adamson, R. and Begbie, Mark and Lowrie, C. and Desmulliez, M.P.Y. and Brown, J.G. and Li, L. and Uttamchandani, D.G. (2008) Design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI. In: The 38th European Solid-State Device Research Conference (ESSDERC) and the 34th European Solid-State Circuits Conference (ESSCIRC), 1900-01-01. (Unpublished)

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Abstract

This paper discusses the design of an integrated monolithic 3-axis piezoresistive accelerometer on SOI.

Creators(s):	Chaehoi, A., Weiland, D., Adamson, R., Begbie, Mark, Lowrie, C., Desmulliez, M.P.Y., Brown, J.G. ORCID: https://orcid.org/0000-0003-2857-5001, Li, L. and Uttamchandani, D.G. ORCID: https://orcid.org/0000-0002-2362-4874;
Item type:	Conference or Workshop Item(Paper)
ID code:	12823
Keywords:	monolithic 3-axis piezoresistive accelerometer, Electrical engineering. Electronics Nuclear engineering
Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
Department:	Faculty of Engineering > Electronic and Electrical Engineering
Depositing user:	Strathprints Administrator
Date deposited:	03 Aug 2010 14:05
Last modified:	07 Feb 2020 06:12
Related URLs:	Event
URI:	https://strathprints.strath.ac.uk/id/eprint/12823
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