Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses
Gu, E. and Jeon, C.W. and Dawson, M.D. (2005) Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. In: European Materials Research Society 2005 Spring Meeting, 2005-05-31 - 2005-06-03. (Unpublished)
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This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.
| Author(s): | Gu, E.  ORCID: https://orcid.org/0000-0002-7607-9902, Jeon, C.W. and Dawson, M.D. ORCID: https://orcid.org/0000-0002-6639-2989 | Item type: | Conference or Workshop Item(Paper) |
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| ID code: | 9040 |
| Keywords: | photolithography, ultraviolet LED, LED, micro-lenses, Optics. Light |
| Subjects: | Science > Physics > Optics. Light |
| Department: | Faculty of Science > Physics > Institute of Photonics |
| Depositing user: | Strathprints Administrator |
| Date deposited: | 17 Nov 2009 13:56 |
| Last modified: | 08 Jan 2020 19:01 |
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| URI: | https://strathprints.strath.ac.uk/id/eprint/9040 |
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