Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses

Gu, E. and Jeon, C.W. and Dawson, M.D. (2005) Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. In: European Materials Research Society 2005 Spring Meeting, 2005-05-31 - 2005-06-03. (Unpublished)

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Abstract

This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.

ORCID iDs

Gu, E.

, Jeon, C.W. and Dawson, M.D.

;

Item metadata

Item type:	Conference or Workshop Item(Paper)
ID code:	9040
Dates:	Date Event 2 June 2005 Published
Keywords:	photolithography, ultraviolet LED, LED, micro-lenses, Optics. Light
Subjects:	Science > Physics > Optics. Light
Department:	Faculty of Science > Physics > Institute of Photonics
Depositing user:	Strathprints Administrator
Date deposited:	17 Nov 2009 13:56
Last modified:	18 Mar 2021 01:44
Related URLs:	Event
URI:	https://strathprints.strath.ac.uk/id/eprint/9040

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