Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses

Gu, E. and Jeon, C.W. and Dawson, M.D. (2005) Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. In: European Materials Research Society 2005 Spring Meeting, 2005-05-31 - 2005-06-03. (Unpublished)

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Abstract

This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.

Creators(s):	Gu, E. ORCID: https://orcid.org/0000-0002-7607-9902, Jeon, C.W. and Dawson, M.D. ORCID: https://orcid.org/0000-0002-6639-2989;
Item type:	Conference or Workshop Item(Paper)
ID code:	9040
Keywords:	photolithography, ultraviolet LED, LED, micro-lenses, Optics. Light
Subjects:	Science > Physics > Optics. Light
Department:	Faculty of Science > Physics > Institute of Photonics
Depositing user:	Strathprints Administrator
Date deposited:	17 Nov 2009 13:56
Last modified:	17 Dec 2020 03:27
Related URLs:	Event
URI:	https://strathprints.strath.ac.uk/id/eprint/9040
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