Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses

Gu, E. and Jeon, C.W. and Dawson, M.D. (2005) Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. In: European Materials Research Society 2005 Spring Meeting, 2005-05-31 - 2005-06-03. (Unpublished)

Abstract

This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.

ORCID iDs

Gu, E. ORCID: https://orcid.org/0000-0002-7607-9902

Dawson, M.D. ORCID: https://orcid.org/0000-0002-6639-2989

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• Item metadata

  Item type:	Conference or Workshop Item(Paper)
  ID code:	9040
  Dates:	Date Event 2 June 2005 Published
  Keywords:	photolithography, ultraviolet LED, LED, micro-lenses, Optics. Light
  Subjects:	Science > Physics > Optics. Light
  Department:	Faculty of Science > Physics > Institute of Photonics
  Depositing user:	Strathprints Administrator
  Date deposited:	17 Nov 2009 13:56
  Last modified:	15 Sep 2021 15:54
  Related URLs:	Event
  URI:	https://strathprints.strath.ac.uk/id/eprint/9040