GaN micro-LED arrays with integrated sapphire micro-lenses

Choi, H.W. and Jeon, C.W. and Liu, C. and Dawson, M.D.; (2003) GaN micro-LED arrays with integrated sapphire micro-lenses. In: LEOS 2003: 16th Annual Meeting of the IEEE Lasers & Electro-Optics Society. IEEE, pp. 654-655. ISBN 0-7803-7888-1

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Abstract

GaN micro-LED devices with integrated micro-lenses have been demonstrated. The micro-lenses, with a focal length of 24 microns, are fabricated on the polished backside of the sapphire substrate by ICP etching.

ORCID iDs

Choi, H.W., Jeon, C.W., Liu, C. and Dawson, M.D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989;