Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma

Lee, C.L. and Gu, E. and Dawson, M.D. and Friel, I. and Scarbrook, G.A. (2007) Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. In: 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides, 2007-09-09 - 2007-09-14. (Unpublished)

Abstract

This paper is about etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. It was presented at the 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides in 2007.

ORCID iDs

Gu, E. ORCID: https://orcid.org/0000-0002-7607-9902

Dawson, M.D. ORCID: https://orcid.org/0000-0002-6639-2989

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• Item metadata

  Item type:	Conference or Workshop Item(Paper)
  ID code:	8989
  Dates:	Date Event 12 September 2007 Published
  Notes:	Also available as a journal article at http://strathprints.strath.ac.uk/13999/
  Subjects:	Science > Physics > Optics. Light
  Department:	Faculty of Science > Physics > Institute of Photonics Faculty of Science > Physics
  Depositing user:	Strathprints Administrator
  Date deposited:	03 Nov 2009 12:00
  Last modified:	11 Nov 2024 16:20
  Related URLs:	http://www.diamond-conference.elsevier.c...
  URI:	https://strathprints.strath.ac.uk/id/eprint/8989