A single micro-LED manipulation system based on micro-gripper

Bai, Jie and Niu, Pingjuan and Gu, Erdan and Li, Jianming and Augustine TH Tee, Clarence (2024) A single micro-LED manipulation system based on micro-gripper. Nanotechnology and Precision Engineering, 7 (2). 023005. ISSN 2589-5540 (https://doi.org/10.1063/10.0024319)

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Micro-LEDs (μLEDs) have advantages in terms of brightness, power consumption, and response speed. In addition, they can also be used as micro-sensors implanted in the body via flexible electronic skin. One of the key techniques involved in the fabrication of μLED-based devices is transfer printing. Although numerous methods have been proposed for transfer printing, improving the yield of μLED arrays is still a formidable task. In this paper, we propose a novel method for improving the yield of μLED arrays transferred by the stamping method, using an innovative design of piezoelectrically driven asymmetric micro-gripper. Traditional grippers are too large to manipulate μLEDs, and therefore two micro-sized cantilevers are added at the gripper tips. A μLED manipulation system is constructed based on the micro-gripper together with a three-dimensional positioning system. Experimental results using this system show that it can be used successfully to manipulate μLED arrays.