Continuous roller transfer-printing of QVGA semiconductor micro-pixel arrays

Margariti, Eleni and Guilhabert, Benoit and Quinn, Gemma and Jevtics, Dimitars and Dawson, Martin D. and Strain, Michael J.; (2022) Continuous roller transfer-printing of QVGA semiconductor micro-pixel arrays. In: 2022 IEEE Photonics Conference (IPC). 2022 IEEE Photonics Conference (IPC) . IEEE, CAN. ISBN 9781665434874 (https://doi.org/10.1109/ipc53466.2022.9975605)

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Abstract

We demonstrate an automated roll-transfer printing method for the parallel integration of >75k devices in a single shot. Automated high resolution metrology shows semiconductor micro-pixel array transfer with 1.43 μ m printing accuracy and 95 % yield.