Remote-refocus microscopy using a MEMS piston micromirror

Christopher, Jay and Rooney, Liam and Uttamchandani, Deepak and Bauer, Ralf (2023) Remote-refocus microscopy using a MEMS piston micromirror. In: Microscience Microscopy Congress 2023, 2023-07-03 - 2023-07-06, Manchester Central.

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Abstract

We demonstrate a remote-refocus microscopy system with volume acquisition rates of up to 150 Hz using a microelectromechanical systems (MEMS) mirror with controllable piston movement. The small footprint, affordable and easily controllable 2 mm mirror allows nm scale alignment precision of the focal plane, with an overall axial focus shift of up to 100µm with a 100x 1.25 NA imaging objective.