Sub-micron-accuracy automated position and rotation registration method for transferred devices

Margariti, Eleni and Guilhabert, Benoit and Jevtics, Dimitars and Dawson, Martin D. and Strain, Michael J.; (2021) Sub-micron-accuracy automated position and rotation registration method for transferred devices. In: 2021 IEEE Photonics Conference. IEEE Photonics Conference . IEEE, Piscataway, NJ, pp. 978-979. ISBN 9781665416016 (https://doi.org/10.1109/IPC48725.2021.9592935)

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Abstract

We demonstrate a high accuracy and throughput automated method for the spatial registration of micron-scale devices on planar chips. The system is used to assess the yield, spatial pitch and rotation of mass transfer-printed membrane devices (here micro-LEDs for illustration) using simple optical microscopy tools.

ORCID iDs

Margariti, Eleni, Guilhabert, Benoit ORCID logoORCID: https://orcid.org/0000-0002-3986-8566, Jevtics, Dimitars ORCID logoORCID: https://orcid.org/0000-0002-6678-8334, Dawson, Martin D. ORCID logoORCID: https://orcid.org/0000-0002-6639-2989 and Strain, Michael J. ORCID logoORCID: https://orcid.org/0000-0002-9752-3144;
  • Item type:Book Section
    ID code:83526
    Dates:
    Date
    Event
    12 November 2021
    Published
    18 October 2021
    Published Online
    18 July 2021
    Accepted
    Notes:© 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
    Subjects:Science > Physics
    Department:Faculty of Science > Physics
    Faculty of Science > Physics > Institute of Photonics
    Technology and Innovation Centre > Photonics
    Depositing user: Pure Administrator
    Date deposited:14 Dec 2022 12:54
    Last modified:11 Nov 2024 15:29
    URI:https://strathprints.strath.ac.uk/id/eprint/83526
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