Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing
Li, Zhibo and Smith, Jack A. and Scullion, Mark and Wessling, Nils Kolja and McKnight, Loyd J. and Dawson, Martin D. and Strain, Michael J. (2022) Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing. Optical Materials Express, 12 (11). pp. 4375-4383. ISSN 2159-3930 (https://doi.org/10.1364/OME.474200)
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Abstract
The heterogeneous integration of pre-fabricated lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make free-standing lithium niobate membrane devices compatible with back-end integration onto photonic integrated circuits. Micro-ring resonators in membrane format were lithographically defined by using laser direct writing and plasma dry etching. The lithium niobate micro-ring resonators were then transferred from their host substrate and released onto a silicon nitride waveguide chip. An all-pass ring resonator transmission spectrum was obtained in the 1.5 µm to 1.6 µm wavelength range, with a measured loaded Q-factor larger than 3.2
ORCID iDs
Li, Zhibo, Smith, Jack A., Scullion, Mark, Wessling, Nils Kolja ORCID: https://orcid.org/0000-0002-6182-3567, McKnight, Loyd J., Dawson, Martin D. ORCID: https://orcid.org/0000-0002-6639-2989 and Strain, Michael J. ORCID: https://orcid.org/0000-0002-9752-3144;-
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Item type: Article ID code: 82833 Dates: DateEvent1 November 2022Published19 October 2022Published Online17 October 2022AcceptedSubjects: Science > Physics Department: Faculty of Science > Physics > Institute of Photonics
Faculty of Science > Physics
Technology and Innovation Centre > PhotonicsDepositing user: Pure Administrator Date deposited: 19 Oct 2022 09:31 Last modified: 05 Dec 2024 04:51 URI: https://strathprints.strath.ac.uk/id/eprint/82833