22.3 kHz update rate Lissajous scanning using a single double resonant MEMS scanner

Christopher, Jay and Janin, Paul and Uttamchandani, Deepak and Bauer, Ralf (2022) 22.3 kHz update rate Lissajous scanning using a single double resonant MEMS scanner. In: International Conference on Optical MEMS and Nanophotonics (OMN) 2022, 2022-09-12 - 2022-09-15, Online.

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Abstract

A double resonant MEMS scanner with on-chip frequency tuning capability is presented, which enables generation of two dimensional Lissajous projection patterns with update rates of up to 22.3 kHz. The piezoelectric scanner has an electrothermal frequency tuning capability with simultaneous tuning of 4% and 0.3% of the two orthogonal movement modes, allowing Lissajous scan pattern update rate and fill factor selection.

ORCID iDs

Christopher, Jay ORCID logoORCID: https://orcid.org/0009-0009-0707-8947, Janin, Paul, Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874 and Bauer, Ralf ORCID logoORCID: https://orcid.org/0000-0001-7927-9435;
  • Item type:Conference or Workshop Item(Paper)
    ID code:82654
    Dates:
    Date
    Event
    15 September 2022
    Published
    15 September 2022
    Published Online
    18 August 2022
    Accepted
    12 July 2022
    Submitted
    Notes:© 2022 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
    Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
    Department:Faculty of Engineering > Electronic and Electrical Engineering
    Strategic Research Themes > Health and Wellbeing
    Depositing user: Pure Administrator
    Date deposited:11 Oct 2022 09:11
    Last modified:21 Nov 2024 01:41
    URI:https://strathprints.strath.ac.uk/id/eprint/82654
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