Vibration-assisted roll-type polishing system based on compliant micro-motion stage

Gu, Yan and Chen, Xiuyuan and Lin, Jieqiong and Lu, Mingming and Lu, Faxiang and Zhang, Zheming and Yang, Hao (2018) Vibration-assisted roll-type polishing system based on compliant micro-motion stage. Micromachines, 9 (10). pp. 1-25. 499. ISSN 2072-666X (

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This paper aims to create a high-quality surface based on the linear contact material removal mechanism. For this paper, a piezo-driven, flexure-based micro-motion stage was developed for the vibration-assisted roll-type precision polishing system. Meanwhile, the compliance matrix method was employed to establish the amplification ratio and compliance model of the flexure mechanism. The dimensions of the mechanism were optimized using the grey wolves optimization (GWO) algorithm, aiming to maximize the natural frequencies. Using the optimal parameters, the established models for the mechanical performance evaluation of the flexure stage were verified with the finite-element method. Through closed-loop test, it was proven that the proposed micro-motion stage performs well in positioning micro motions. Finally, high quality surface using silicon carbide (SiC) ceramic with 36 nm Sa was generated by the independently developed vibration-assisted roll-type polishing machine to validate the performance of the established polishing system.


Gu, Yan, Chen, Xiuyuan ORCID logoORCID:, Lin, Jieqiong, Lu, Mingming, Lu, Faxiang, Zhang, Zheming and Yang, Hao;