Vibration-assisted roll-type polishing system based on compliant micro-motion stage
Gu, Yan and Chen, Xiuyuan and Lin, Jieqiong and Lu, Mingming and Lu, Faxiang and Zhang, Zheming and Yang, Hao (2018) Vibration-assisted roll-type polishing system based on compliant micro-motion stage. Micromachines, 9 (10). pp. 1-25. 499. ISSN 2072-666X (https://doi.org/10.3390/mi9100499)
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Abstract
This paper aims to create a high-quality surface based on the linear contact material removal mechanism. For this paper, a piezo-driven, flexure-based micro-motion stage was developed for the vibration-assisted roll-type precision polishing system. Meanwhile, the compliance matrix method was employed to establish the amplification ratio and compliance model of the flexure mechanism. The dimensions of the mechanism were optimized using the grey wolves optimization (GWO) algorithm, aiming to maximize the natural frequencies. Using the optimal parameters, the established models for the mechanical performance evaluation of the flexure stage were verified with the finite-element method. Through closed-loop test, it was proven that the proposed micro-motion stage performs well in positioning micro motions. Finally, high quality surface using silicon carbide (SiC) ceramic with 36 nm Sa was generated by the independently developed vibration-assisted roll-type polishing machine to validate the performance of the established polishing system.
ORCID iDs
Gu, Yan, Chen, Xiuyuan ORCID: https://orcid.org/0000-0002-5999-0227, Lin, Jieqiong, Lu, Mingming, Lu, Faxiang, Zhang, Zheming and Yang, Hao;-
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Item type: Article ID code: 81302 Dates: DateEvent29 September 2018Published27 September 2018AcceptedNotes: Gu Y, Chen X, Lin J, Lu M, Lu F, Zhang Z, Yang H. Vibration-Assisted Roll-Type Polishing System Based on Compliant Micro-Motion Stage. Micromachines. 2018; 9(10):499. https://doi.org/10.3390/mi9100499 Subjects: Technology > Manufactures
Technology > Mechanical engineering and machineryDepartment: Faculty of Engineering > Design, Manufacture and Engineering Management Depositing user: Pure Administrator Date deposited: 30 Jun 2022 07:57 Last modified: 26 Oct 2024 10:39 URI: https://strathprints.strath.ac.uk/id/eprint/81302