On-machine focus variation measurement for micro-scale hybrid surface texture machining
Santoso, Teguh and Syam, Wahyudin P. and Darukumalli, Subbareddy and Cai, Yukui and Helmli, Franz and Luo, Xichun and Leach, Richard (2020) On-machine focus variation measurement for micro-scale hybrid surface texture machining. International Journal of Advanced Manufacturing Technology, 109 (9-12). pp. 2353-2364. ISSN 0268-3768
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Abstract
Fast and accurate in-line areal surface topography measuring instruments are required to control the quality of microscale manufactured components, without significantly slowing down the production process. Full-field areal optical surface topography measurement instruments are promising for in-line or on-machine measurement applications due to their ability to measure quickly, to access small features and to avoid surface damage. This paper presents the development and integration of a compact optical focus variation sensor for on-machine surface topography measurement mounted on to a hybrid ultraprecision machine tool. The sensor development is described and a case study involving the on-machine dimensional measurement of the depth of hydrophobic microscale features, including microchannels and micro-dimples, is presented. Comparisons of results between the on-machine measurements obtained by the developed sensor and a desktop focus variation microscope are presented and discussed. The comparison results show that the developed focus variation sensor is able to perform on-machine dimensional measurement of microscale features within sub-micrometre accuracy.
Creators(s): |
Santoso, Teguh, Syam, Wahyudin P., Darukumalli, Subbareddy, Cai, Yukui, Helmli, Franz, Luo, Xichun ![]() | Item type: | Article |
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ID code: | 74198 |
Keywords: | focus variation, motion stage, on-machine measurement, precision engineering, surface texture, Mechanical engineering and machinery, Control and Systems Engineering, Software, Mechanical Engineering, Computer Science Applications, Industrial and Manufacturing Engineering |
Subjects: | Technology > Mechanical engineering and machinery |
Department: | Faculty of Engineering > Design, Manufacture and Engineering Management |
Depositing user: | Pure Administrator |
Date deposited: | 09 Oct 2020 14:30 |
Last modified: | 01 Jan 2021 13:54 |
Related URLs: | |
URI: | https://strathprints.strath.ac.uk/id/eprint/74198 |
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