Test structure and measurement system for characterising the electrochemical performance of nanoelectrode structures

Schmueser, Ilka and Blair, Ewen O. and Isiksacan, Ziya and Li, Yifan and Corrigan, Damion K. and Stokes, Adam A. and Terry, Jonathan G. and Mount, Andrew R. and Walton, Anthony J.; (2020) Test structure and measurement system for characterising the electrochemical performance of nanoelectrode structures. In: 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS). IEEE, Piscataway, N.J.. ISBN 978-1-7281-4008-7

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    Abstract

    This paper presents a complete test structure and characterisation system for the evaluation of nanoelectrode technology. It integrates microfabricated nanoelectrodes for electrochemical measurements, 3D printing and surface tensionconfined microfluidics. This system exploits the inherent analytical advantages of nanoelectrodes that enables their operation with small volume samples, which has potential applications for onwafer measurements.